infraredthin鄄films
WangDuoshu,LiYoulu,LiKaipeng,WangJizhou,DongMaojin(ScienceandTechnologyonVacuumTechnologyandPhysicsLaboratory,LanzhouInstituteofPhysics,Lanzhou730000,China)
Abstract:Opticalelementsclosedtophotodetectoralwaysworkinlowtemperatureininfraredopticalsystem,andthetransmittedspectrumofthesystemwouldbeshiftedbythelowtemperaturecondition.Thisshiftcanaffecttheimagequalityofthesystemseriously.Somestudyhavefoundthatthereasonsofthespectralshiftarethechangeoftherefractiveindexoftheinfraredthin鄄filmsinthesystem.Inthepaper,temperaturecharacteristicsoftheinfraredthin鄄filmswerestudied.Basedonthetheoryofopticalthinfilmandanalysisofseveralkindsofwavelengthdispersionmodel,anewresearchonthetemperaturecharacteristicmethodofinfraredthinfilmwasputforward.Withthemethod,therefractiveindexofinfraredthinfilmatdifferenttemperaturecanbemeasuredbyspectralinversionaccordingtothetransmissionspectra,andthen,aformulaforcalculatingrefractiveindexofinfraredthinfilmcanbededucedbasedontheCauchydispersionmodelthroughdatafittinganalysis.Thetemperaturecharacteristicsoftwokindsofinfraredtypicalfilmmaterials(PbTeandGe)werestudiedwiththemethod,andtheresultsverifythevalidityofthemethod.Keywords:temperaturecharacteristic;infraredthin鄄films;dispersionmodel收稿日期院2017-11-05曰作者简介院修订日期院2017-12-03袁袁袁遥Email:wang_d_s@163.com
(1973-)袁0404006-1
红外与激光工程
第4期www.irla.cn第47卷0引言袁遥袁袁/袁袁袁袁尧遥袁遥[7]
[1-2]
曰B尧(2)C遥袁袁尧遥-袁尧遥遥袁袁尧遥冶遥尧袁袁袁尧袁尧遥遥袁/袁袁袁/[3-6]
袁袁PbTe袁Ge遥袁遥PerkinElmerFrontier野80K(77K)袁PbTeZnS袁尧袁袁遥[8-9]
袁2红外光学薄膜材料折射率温度特性研究方法遥袁/袁袁(2)遥(2)遥A1袁(3)遥袁袁袁袁袁尧袁CauchyAn袁Bn袁Cn袁PbTe尧Ge尧Si尧ZnS尧ZnSe尧YF3(PbTe)袁nnn()=An+B2+C4+噎(Ge)遥遥袁遥77~300K袁院袁T1袁T2袁噎袁TmT1袁遥(3)驻TB1袁C1袁Cauchy11n1=f1()=A1+B2+C4+噎1理论基础及研究方法(1)(1)院(1)(4)~(6)院(A2袁B2袁C2)袁(A3袁B3袁C3)袁噎袁(Am袁Bm袁Cm)T2袁T3袁噎袁Tm22n2=f2()=A2+B2+C4+噎33n3=f3()=A3+B2+C4+噎(4)(5)(6)院T(袁d袁n袁k)袁T()=院040g(0B+C)(0B+C)*nm=fm()=Am+Bm+Cm+噎24M袁(7)g0404006-2
红外与激光工程
第4期杉山山山山山山山山山山山山山删
www.irla.cn第47卷A1B1C1噎A2B2C2噎AmBmCm噎Cauchy袁袁:M=Cauchy袁袁袁T/T煽衫衫衫衫衫衫衫衫衫衫衫衫衫闪
(7)M(8)/n=f(袁T)(9)310魡/s(1魡=10-10m)遥1袁遥袁121)袁(袁7~12滋m院袁袁院n=f(袁T)(8)An尧Bn尧Cn(9)An=f(T)袁Bn=f(T)袁Cn=f(T)N=fm(袁T)=Am+Bm+Cm+噎24M袁MT袁袁院曰曰曰/袁院院袁院遥袁曰-袁院1PbTe(b)
(a)CauchyAn尧Bn尧CnAn尧Bn尧CnFig.1TransmittancespectraofPbTefilmindifferenttemperature
(a),anditsrefractiveindexvariationwithwavelength(b)
n=f(袁T)遥表1不同温度条件下PbTe单层膜折射率波长色散模型中的系数值Tab.1CoefficientvalueofthePbTefilmrefractiveindexdispersionmodelindifferent3典型红外光学薄膜材料折射率温度特性分析验证袁袁袁袁遥袁袁袁/遥袁/遥遥PbTeGetemperatureTemperature/K80100120140160180200220240260280300
An5.61145.57655.52105.50885.4475.42735.40735.38285.37435.36575.35855.3498
Bn8.0117.9998.0028.0128.0088.0108.0047.9977.9848.0018.0088.010
Cn0.23230.22730.22030.21940.21870.21030.20960.20650.20520.20480.20370.2030
3.1PbTe材料GePbTe750nm袁3.0伊10-3Pa袁250益袁1袁PbTe0404006-3
红外与激光工程
第4期www.irla.cn第47卷遥袁袁袁袁袁院袁An遥遥12)Ge袁1650nm袁Ge150益袁2遥(300mA遥3.0伊10-3Pa袁袁3遥An尧Bn尧CnT袁袁/5魡/s(1魡=10-10m)袁3袁遥Bn袁Cn(9)袁(10)PbTen=f(袁T)=5.8284-0.00304T+4.6145伊10-6T2+8.0028+0.21544姿2袁(10)7~12滋m2遥PbTe袁PbTe袁3Ge(b)
(a)Fig.3TransmittancespectraofGefilmindifferenttemperature(a),
anditsrefractiveindexvariationwithwavelength(b)
表2不同温度条件下Ge单层折射率波长色散模型中各系数值Tab.2CoefficientvalueoftheGerefractiveindexdispersionmodelindifferenttemperature2PbTeTemperature/K80100120140160180
An3.80663.80823.81053.81473.82633.84443.85293.86063.86913.87893.88773.8973
Bn0.695710.799330.864890.922250.872890.684070.670480.669920.674110.686740.702590.6819
Cn0.03100.01370.01150.02140.04920.03850.03490.01520.02140.01750.01780.0321
Fig.2Comparisonbetweendesignandmeasurementtransmittance
spectraofPbTefilmindeferenttemperature
袁2/袁PbTePbTe袁7滋m遥袁200220240260280300
遥袁3.2Ge材料ZnSe0404006-4
袁Ge红外与激光工程
第4期www.irla.cn第47卷袁袁遥遥袁CnGe袁院T袁/袁(9)袁An尧Bn尧Cn袁An尧Bn袁T袁(11)n(袁T)=3.8415-9.682伊10-4T+7.479伊10-6T2-1.219伊10-8T3+-2.5140+0.07776T-6.2349伊10-4T2+2.0572伊10-6T3-2.414伊10-9T4+0.02454姿2Ge袁PbTeGe遥Ge4遥袁Ge遥袁/袁(11)袁袁PbTe参考文献院[1]
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Fig.4Comparisonbetweendesignandmeasurementtransmittance
spectraofGefilmindeferenttemperature
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Cauchy0404006-5
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